00963cam a2200241 a 4500 1/33232 070831s2001 enka b 000 0 eng d 047152185X 35645 GR-PeUP 621.381 VAR Varadan, V. K., 1943- Microstereolithography and other fabrication techniques for 3D MEMS / Vijay K. Varadan, X. N. Jiang and Vasundara V. Varadan. Chichester ; New York : J. Wiley, c2001. xiii, 260 σ. : εικ. ; 24 εκ. Περιέχει βιβλιογραφία και ευρετήριο. Microelectromechanical systems Design and construction. Microlithography. Three-dimensional display systems. Jiang, Xiaoning. Varadan, V. V., 1948- INST UNIPILB MAIN 20070831 621.381 VAR 00153528 00153528 LOAN 0 1 /webopac/covers/02/35645_047152185X.jpg